I do remember bits. A man on on this alien planet somewhere where people have been killed or something by aliens (I think at least some of the aliens were small.) I remember he tries to keep a child alive (a girl, I think) and at the end, he escapes on a spacecraft of some sort, it's not like a big spaceship. The childs teddy bear is sitting where he can see it and it is implied that one of the small aliens is in the teddy bear, and that's where the film ends.
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Screamers?
This sound right. The ending you describe is from 'Screamers'.
EDIT: Provided link
Yes, it sounds very similar to Aliens.